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Program of Precision Machinery and Semiconductor

  This program mainly focuses on researches of Semiconductor Process System, Mechanical System and Electrical Control System, and Mechatronics System. Among these topics, our researches include the R&D of vacuum system, process reaction, and plasma system. In addition to these systems, our group members also work on the design of semiconductor fabrication equipment, as well as the R&D of its electrical control system. Hopefully, on the basis of these efforts, we would be able to do further researches in mechatronics, human-machine interface, and automation control.
 
  Here are our research projects: (1) new oxidation diffusion, our researchers specifically designed long-term research projects for key technologies of precision oxidization control and high-speed heating and cooling; (2) new thin film deposition system, our researchers specifically designed long-term research projects for key technologies of low dielectric constant thin film deposition system and high dielectric thin film; (3) new Photolithography devices, our researchers specifically designed long-term research projects for key technologies of electron beam, X-ray control, and Immersion lithography; (4) new chemical mechanical polishing devices, our researchers specifically designed long-term research projects for key technologies of flattening, uniformity, and selectivity control.